英諾賽科與ASML簽署合作協議

發布日期：2021-01-22   瀏覽量：3389

2021年1月21日，中國珠海-英諾賽科科技有限公司和ASML公司達成批量購買高產能i-line和KrF光刻機的協議，用于制造先進的硅基氮化鎵功率器件。

全球領先的硅基氮化鎵集成器件制造商英諾賽科科技有限公司和光刻機制造廠商ASML近期達成批量購買高產能i-line和KrF光刻機的合作協議。ASML是全球芯片制造設備領導廠商，其生產的XT400和XT860 的i-line和KrF經過升級，能夠在硅基晶圓上制造氮化鎵功率器件。憑借其獨特的TWINSCAN(雙工件臺)架構，ASML的i-line和KrF光刻機能提供最卓越的性能、市場上最高的生產效率以及最低的成本。雙工件臺技術架構已經成為全球300mm和200mm晶圓量產生產線中的先進光刻技術代表 。英諾賽科將在今年第二季度搬入首批光刻機，這是第三代半導體領域首次量產應用先進的ASML TWINSCAN(雙工件臺)光刻技術，這一實施標志著第三代半導體制造技術正式進入了一個全新的紀元。

英諾賽科科技有限公司成立于2015年12月，是一家致力于第三代半導體硅基氮化鎵芯片制造的企業。公司成功建成投產全球首條200mm硅基氮化鎵晶圓與功率器件量產生產線，主要產品包括200mm硅基氮化鎵晶圓及30V-650V氮化鎵功率器件。英諾賽科產品的設計與性能均達到國際最先進水平，并已廣泛應用于PD快充、立體(3D)相機、移動電子設備(包括智能手機、筆記本電腦、平板電腦)等領域。英諾賽科致力于打造世界一流品牌，并為全球寬禁帶半導體產業的發展做出貢獻。

功率器件和電路可以通過高開關頻率和高功率密度來實現高效的能源管理， 這些功能可以廣泛用于快速增長的新興市場如數據中心、可再生能源和下一代無線通訊網絡等。除較小的外形尺寸外，由于其高頻率、高功率密度等特性，硅基氮化鎵還是快速充電，直流電網，新能源汽車等市場理想選擇。“第三代半導體”材料包括氮化鎵(GaN) 、碳化硅（SiC）、氮化鋁（AlN）、金剛石和氧化鋅（ZnO），而氮化鎵(GaN)是“第三代半導體”材料的典型代表，具有廣闊的市場應用前景。

2021年1月21日在珠海舉行的簽約儀式上，英諾賽科CEO 孫在亨先生 說：“我非常榮幸的宣布英諾賽科與ASML達成合作協議，我們將在一起努力用氮化鎵技術改變未來。作為一家致力于推動第三代半導體創新革命的企業，我們需要與像ASML這樣全球半導體領軍的企業合作，采用更加先進的制造工藝，實現更加高的性能、良率和產出，在快速成長的各種應用領域(例如快充、TOF相機(Time-of-Flight Camera) 、智能手機、電動車、數據中心等)共同推出最先進的解決方案以及下個世代的氮化鎵器件，為我們的客戶、伙伴和消費者創造更有價值的產品和服務。第三代半導體是一次產業革命性的升級，變革從不簡單，它需要我們攜手共進，攜手共進我們將實現合作共贏。

ASML全球副總裁，中國區總裁沈波表示：“我們很高興成為英諾賽科的合作伙伴，第三代半導體在全球市場有廣闊的應用前景，阿斯麥會全力提供光刻解決方案和服務，支持英諾賽科在這一領域的發展。”

“我們應用在200mm晶圓生產線上的 XT平臺，包括i-line、KrF和干式ArF等光刻機，是快速增長的硅基氮化鎵市場的理想長期解決方案，不僅在生產率和成本方面是這樣， 隨著氮化鎵（GaN）材料在新領域的應用，套準精度和成像要求也會隨著時間的推移而擴展。” ASML 深紫外光刻業務產品營銷和業務開發高級總監Toni Mesquida Kuesters說: “我們致力于幫助英諾賽科實現其預期目標，并期待卓有成效的合作。”

關于英諾賽科

英諾賽科成立于2015年12月，是一家硅基氮化鎵芯片集成制造的企業。隨著科學技術的快速發展，全球電力能源應用系統正在發生巨大轉變。我們的愿景就是用先進、高效、低成本的硅基氮化鎵技術助力新時代高效能源系統的建設。2017年11月，英諾賽科在珠海建設完成全球首條8英寸硅基氮化鎵量產線。為了滿足快速爆發的市場的需求，2020年9月，英諾賽科蘇州工廠建設完成。作為領先的第三代半導體技術供應商，英諾賽科的IDM全產業鏈集成制造模式可以為客戶帶來更加高效、高可靠性的解決方案，其產品可以廣泛應用于云計算(數據中心)、汽車、移動電子設備等領域。

關于ASML

總部位于荷蘭的ASML是全球芯片制造設備領導廠商，并且是芯片光刻技術的領導者。我們的愿景是驅動半導體的各種應用來幫助解決人類生活中各種挑戰。為了實現這個目標，我們提供創新的產品和服務來幫助芯片制造商不斷微縮芯片。我們不斷提高產品的性能，以幫助客戶持續提升芯片價值并降低成本。我們致力于讓芯片的性能更強大、價格更合理，進而促使半導體技術能更廣泛的應用于醫療、能源、通訊和娛樂等相關產品與服務中30多年來，ASML的成功來自于和客戶及供貨商緊密合作所共同創造的領先技術、高效能的流程和優秀的員工。ASML在全球16個國家的60個城市設有辦公室，員工超過28000。ASML為荷蘭阿姆斯特丹證券交易所和美國NASDAQ上市公司。更多關于ASML及其產品和技術、職業發展機會，請參閱: www.asml.com

January 21, 2021 – InnoScience and ASML reached a volume purchase agreement for upgraded versions of high throughput i-line and KrF TWINSCAN scanners for advanced GaN on Silicon power semiconductors

Leading GaN-on-Silicon Integrated Device Manufacturer Innoscience Technology Co., Ltd. (“Innoscience”) has recently purchased several TWINSCAN scanners from ASML Holding N.V. (“ASML”), the world’s leading provider of lithography systems to the semiconductor industry.  ASML’s XT: 400 and XT: 860 200 mm i-line and KrF scanners, respectively, will be adapted to manufacture GaN-on-Si Power Devices. These tools will not only offer the best performance, but also the highest productivity and lowest cost of ownership available in the market place.  ASML’s dual stage TWINSCAN architecture, currently represents the lithography backbone at most of the 200mm and 300 mm high volume manufacturing sites worldwide. Innoscience will receive the first systems in the second quarter of this year. Innoscience is the world first company in the wide band-gap semiconductor field to apply ASML’s advanced TWINSCAN lithography tool in mass production, this effort will bring the fast growing industry to a new era.

Lithography equipment for growing megatrends

Innoscience, which was founded in December 2015, is a company dedicated to developing GaN on Si power solutions.  Innoscience successfully established the world first 200mm GaN-on-Si Power Device mass production line, to provide a wide range of product including 30V-650V GaN-on-Si power devices. Innoscience product design and performance have reached international advanced level and are currently widely available in Power Delivery charger, 3D camera, portable device including smart phone, laptop, tablet, etc. Innoscience is committed to build a world-class brand and contribute to the wide band-gap semiconductor industry and its eco-system.

GaN-based power devices and circuits enable high switching frequencies and efficient energy management with high power densities. These features are required for rapidly growing applications such as data centers, renewable energy and the next generation of wireless networks. Alongside the much smaller size factor, GaN-on-Si is an ideal candidate for rapid charging and car electrification. Gallium nitride (GaN) is also called “third generation semiconductor”, together with other materials like e.g. silicon carbide (SiC), aluminum nitride (AlN), diamond, and zinc oxide (ZnO).

Chosen by the best in the industry

Jay Son, CEO of InnoScience, said: “I’m honored to announce Innoscience and ASML have entered into a partnership aimed at changing the future with GaN technology. As an innovation leader in the third generation semiconductors, Innoscience needs strong partnerships to fast advance its technology. By creating a cutting-edge solution together with ASML, we will offer added value to our customers, partners, and consumers in fast growing applications such as quick chargers, time-of-flight (ToF) camera, smart phones, electric vehicle, data center, etc. Together, Innoscience and ASML will develop the next-generation of GaN devices, to provide advance solutions to future power world.

Bo Shen, ASML VP and Country Manager of China said, "We are very happy to be a partner of InnoScience. The third generation of semiconductor materials has broad application prospects in the global market. ASML is committed to support customers in this field, with our broad suite of holistic lithography systems and services."

“Our TWINSCAN 200 mm XT scanner platform, including i-line, KrF and dry ArF product lines, is the ideal long-term solution for the rapidly growing GaN-on-Silicon market, not only in terms of productivity and cost of ownership, but also in terms of overlay and imaging requirements, which will evolve over time, as GaN technology is adopted across new applications” said Toni Mesquida Kuesters, Senior Director of Product Marketing & Business Development for DUV Business Line at ASML. “We are committed to help InnoScience achieve their envisaged goals and, and look forward to a fruitful cooperation.”

About Innoscience

Innoscience is an Integrated Device Manufacturer (IDM) company founded in December 2015. With the development of new technologies, the electric power grid across the world is undergoing a massive transformation. Our vision is to create an energy ecosystem with most effective and low-cost Gallium Nitride on Silicon (GaN-on-Si) power solutions. Innoscience first established a mass production line of GaN-on-Si devices in Zhuhai. In order to fulfill the rapidly growing power demands, Innoscience has inaugurated a new facility in the Suzhou in 2020. As a cutting-edge GaN technology provider, Innoscience’s IDM model guarantees high performance and reliability GaN power devices that can be used in various technical fields as cloud computing, vehicle, portable device, etc. For more information, please visit http://www.innoscience.com.cn/.

About ASML

ASML is one of the world’s leading manufacturers of chip-making equipment. Our vision is a world in which semiconductor technology is everywhere and helps to tackle society’s toughest challenges. We contribute to this goal by creating products and services that let chipmakers define the patterns that integrated circuits are made of. We continuously raise the capabilities of our products, enabling our customers to increase the value and reduce the cost of chips. By helping to make chips cheaper and more powerful, we help to make semiconductor technology more attractive for a larger range of products and services, which in turn enables progress in fields such as healthcare, energy, mobility and entertainment. ASML is a multinational company with offices in more than 60 cities in 16 countries, headquartered in Veldhoven, the Netherlands. We employ more than 28,000 people on payroll and flexible contracts (expressed in full time equivalents). ASML is traded on Euronext Amsterdam and NASDAQ under the symbol ASML. More information about ASML, our products and technology, and career opportunities is available on www.asml.com.

 

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